Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method
نویسندگان
چکیده
منابع مشابه
Large Area Full Fill Factor Microlens Arrays
Production of microlens arrays using the resist reflow technique has been extensively reported1,2. Theses arrays have fill factors approaching 75% and in lensed systems the unlensed light introduces noise into the imaging system. N T Gordon, C L Jones and D Purdy3 reported a sophisticated techniques able to create full fill, however, this is expensive. Davies and McCormick4, using optical litho...
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In this paper we focus on the fabrication of individual plastic refractive microlenses with Deep Lithography with Protons (DLP). We give a detailed description of the microlens fabrication technique and the calibration procedure that goes along with it. We highlight the geometrical and optical characteristics of these DLP microlenses and we demonstrate the reproducibility of the fabrication pro...
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This work presents the fabrication of 8X8 PDMS Fresnel microlens array (MLA) by maskless lithographic system. The FWHM intensity values of each spot present a deviation of 8%. Such a MLA can be applied as Shack-Hartmann wavefront sensor and to enhance the efficiency of detector arrays. OCIS codes: (080.2208) Fabrication, tolerancing; (080.4298) Nonimaging optics
متن کاملSequential shrink photolithography for plastic microlens arrays.
Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed ...
متن کاملFill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays.
Single-photon avalanche diode (SPAD) detector arrays generally suffer from having a low fill-factor, in which the photo-sensitive area of each pixel is small compared to the overall area of the pixel. This paper describes the integration of different configurations of high efficiency diffractive optical microlens arrays onto a 32 × 32 SPAD array, fabricated using a 0.35 µm CMOS technology proce...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2004
ISSN: 1094-4087
DOI: 10.1364/opex.12.006366